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WI-5000 Series White Light Interferometry Sensor
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This document describes the WI-5000 Series white light interferometry sensor, which enables high-speed, accurate 3D surface measurements of highly varied targets, including transparent, mirrored, and diffuse surfaces. It highlights the system's ability to measure groove depths, hole depths, bonding wires, and surface roughness with repeatability of 0.1 µm, solving challenges that conventional laser displacement sensors cannot.
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