EPMS Reference Architecture for Semiconductor Fabrication Plants

This document outlines a reference architecture for an Integrated Energy and Power Management System (EPMS) tailored to semiconductor fabrication plants, focusing on SCADA, control levels, and communication network requirements. It addresses key challenges such as power availability, power quality, and energy efficiency, detailing load management schemes, backup power sources, and applicable standards like IEEE 519-2014 and IEC 61000.